Dear Splus-community.
This conference may be of interest to those of you who work in or with
the semiconductor industry. The conference is associated with the annual
IEEE Symposium on VLSI Technology.
I encourage you to submit papers to this conference, as it is a very
good forum for discussion of how statistical methods can be used to
improve the development and delivery of semicondutor technology and
products.
Best regards,
jcd
CFP - Fifth International Workshop on Statistical Metrology
CALL FOR PAPERS
Sunday, June 11, 2000
In Association with the 2000 Symposium on VLSI Technology, Honolulu,
Hawaii
The Fifth International Workshop on Statistical Metrology will take
place on Sunday, June 11, 2000, in Honolulu Hawaii. The Workshop will
be held in association with, and precede, the 2000 Symposium on VLSI
Technology. This Workshop is a forum for discussion of issues in the
generation and utilization of statistically significant information to
characterize and validate VLSI processes, designs, and equipment
operations. Innovative analysis techniques are used to convert raw
measurements of confounded statistical and systematic variations into
useful parameters that model the behavior of real processes and wafers.
In this way, the coupling of statistical data from manufacturing to
circuit and process design is enabled. Statistical Metrology is emerging
as a necessary methodology to contain the cost and cycle time of
advanced IC design and production.
Papers are encouraged in the following areas:
- Metrology for Statistical Process Control (SPC)
- Yield Ramping Methodology in Pre-Production Phase
- Sensor and Measurement Technology
- Spatial and Temporal Variation Analysis Methods
- Short-Flow Methodologies
- Test Chip Design and Measurement
- TCAD Calibration and Validation
- Equipment/Process State Characterization and Control
Prospective authors should prepare a 3-4 page summary of their work,
including illustrations, that is suitable for reproduction in
theWorkshop Proceedings. Selection criteria will emphasize relevance to
statistical concerns in measurement, analysis, and application. Please
submit 30 copies of your paper for review to:
Dr. Purnendu K. Mozumder
5th International Workshop on Statistical Metrology
General Chair
PDF Solutions, Inc.
101 W. Renner Road, Suite #100
Richardson, TX 75082
Tel 972-889-3085
Fax 972-889-2486
Email: pkmz@pdf.com
DEADLINE: Papers should arrive by January 28, 2000. Notice of
acceptance will be sent by March 17, 2000. For further information,
contact Dr. Purnendu Mozumder at 972-889-3085 or Prof. Duane Boning at
617-253-0931.
Please also reference the following web page:
http://www-mtl.mit.edu/StatMet2000/
--
Joseph C. Davis, Ph.D PDF Solutions
101 W. Renner Rd. Ste 100 Consulting and Software for
Richardson, TX 75082 Semiconductor Manufacturing
(972) 889-3025 fax: (972) 889-2486
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